| Title |
A Study on the Sputtering-resistant Properties of MgO Thin-film in the AC Plasma Display Panel (PDP) |
| Authors |
지성원(Ji, Seong-Won) ; 여재영(Yeo, Jae-Yeong) ; 이우근(Lee, U-Geun) ; 조정수(Jo, Jeong-Su) ; 박정후(Park, Jeong-Hu) |
| Keywords |
AC PDP ; PDP protecting layer ; RF discharge ; sputtering-resistant property |
| Abstract |
The life of AC PDP depends largely on the sputtering-resistant property of the protecting layer such as MgO thin-film. However, it is very difficult to measure the sputtering-resistant property in the stable driving conditions of AC PDP. In this paper we have suggested a high speed measurement technique of the sputtering-resistant property of MgO thin-film by applying the MgO thin-film as the target of RF magnetron sputtering system. We have also applied this method to the e-beam MgO and sputter-MgO and e-beam MgO superior to sputter-MgO 3 times over. Also, the relation of Xe gas partial pressure(X) and sputtered thickness(Y) was Y=3.4X+13.5. |