| Title |
Fabrication and Characteristics of Humidity Sensing Device using TiO_2 Sol |
| Authors |
김종택(Kim, Jong-Taek) ; 이백수(Lee, Baek-Su) ; 김철수(Kim, Cheol-Su) ; 유도현(Yu, Do-Hyeon) ; 이덕출(Lee, Deok-Chul) |
| Keywords |
Humidity sensor ; TiO_2thin film ; Sol-Gel method ; Surface potential decay ; Contact angle ; Humidity sensing characteristics |
| Abstract |
Humidity sensors using TiO_2 thin films were fabricated on the multi-electrode device by Sol-Gel method and their wettability, surface potential decays and humidity sensing characteristics were investigated. Contact angle of thin films was 28^{ cic} at 400°C and surface potential decayed rapidly at 400°C. The specimen showed best humidity sensing characteristics at 400°C. From the results, they were confirmed that humidity sensing characteristics of thin films have connection with contact angle and surface potential decays. |