| Title |
A Study of Micro, High-Performance Solenoid-Type RF Chip Inductor |
| Authors |
김재욱(Kim, Jae-Uk) ; 윤의중(Yun, Ui-Jung) ; 정영창(Jeong, Yeong-Chang) ; 홍철호(Hong, Cheol-Ho) ; 서원창(Seo, Won-Chang) |
| Keywords |
RF ; chip inductor ; solenoid ; Al_2O_3 core |
| Abstract |
In this work, small-size, high-performance simple solenoid-type RF chip inductors utilizing an Al2O3 core material were investigated. Copper (Cu) wire with 40μm diameter was used as the coils and the size of the chip inductor fabricated in this work was 2.1mm×1.5mm×1.0mm. The external current source was applied after bonding Cu coil leads to gold pads electro-plated on each end of backsides of a core material. High frequency characteristics of the inductance (L), quality factor (Q), and impedance (Z) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). This HP4291B was also used to obtain the equivalent circuit and its circuit parameters of the chip inductors. This HP4291B was also used to obtain the equivalent circuit and its circuit parameters of the chip inductors. The developed inductors have the self-resonant frequency (SRF) of 1.1 to 3.1 GHz and exhibit L of 22 to 150 nH. The L of the inductors decreases with increasing the SRF. The Z of the inductors has the maximum value at the SRF and the inductors have the quality factor of 70 to 97 in the frequency range of 500 MHz to 1.5 GHz. |