| Title |
Hydrogen-Sensing Behaviors of Pd- and Pt-SiC Schottky Diodes |
| Authors |
김창교(Kim, Chang-Kyo) ; 이주헌(Lee, Joo-Hun) ; 조남인(Cho, Nam-In) ; 홍진수(Hong, Jin-Soo) |
| Keywords |
Gas Sensor ; Schottky Diode ; Pd ; Pt ; Hydrogen ; Catalyst ; Adsorption ; Desorption |
| Abstract |
Hydrogen-sensing behaviors of Pd- and Pt-SiC Schottky diodes, fabricated on the same SiC substrate, have been systematically compared and analyzed as a function of hydrogen concentration and temperature by I-V andΔI-t methods under steady-state and transient conditions. The effects of hydrogen adsorption on the device parameters such as the barrier height are investigated. The significant differences in their hydrogen sensing characteristics have been examined in terms of sensitivity limit, linearity of response, response rate, and response time. For the investigated temperature range, Pd-SiC Schottky diode shows better performance for H2 detection than Pt-SiC Schottky diode under the same testing conditions. The physical and chemical mechanisms responsible for hydrogen detection are discussed. Analysis of the steady-state reaction kinetics using I-V method confirmed that the atomistic hydrogen process is responsible for the barrier height change in the diodes. |