| Title |
Fabrication and Characterization of Suspended-type Thin Film Resonator Using SOI-Micromachining Process |
| Authors |
주병권(Ju, Byeong-Kwon) ; 김현호(Kim, Hyun-Ho) ; 이시형(Lee, Si-Hyung) ; 이전국(Lee, Jeon-Kook) ; 김수원(Kim, Soo-Won) |
| Keywords |
thin film resonator ; SOI ; micromachining ; suspended-type ; floating |
| Abstract |
STFR were fabricated on the floating membrane which was formed by SOI-micromachining process. The floating membranes having a thickness range of 3~15μm could be simply formed by micromachining the directly-bonded and thinned SOI substrate. The STFR device fabricated on the 15μm-thick membrane showed resonance frequency of fr = 1.65 GHz, coupling coefficient of Keff2 = 2.4 %, and series and parallel quality factors of Qs = 91.7 and Qp = 87.7, respectively. |