| Title |
Hot Electron Emission Test of an Ion Source for a Micro Mass Spectrometer |
| Authors |
운현중(Yoon, Hyeun-Joong) ; 김정훈(Kim, Jung-Hoon) ; 박태규(Park, Tae-Gyu) ; 양상식(Yang, Sang-Sik) ; 정광우(Jung, Kwang-Woo) |
| Keywords |
Micro mass spectrometer ; Micro ion source ; Time-of-flight ; Hot filament |
| Abstract |
This paper presents the principle and fabrication of a novel micro mass spectrometer and emission test of hot electron for ionization. A micro mass spectrometer consists of a micro ion source and a micro ion separator. The micro ion source consists of a hot filament and grid electrodes. Electrons emitted from a hot filament are to ionize some sample molecules. The ions are accelerated to an ion detector by an electric field. Mass can be analyzed by using the time of fight depending on the mass-to-charge ratio. The current of hot electron emission from the hot filament is measured for various input voltages. |