• 대한전기학회
Mobile QR Code QR CODE : The Transactions of the Korean Institute of Electrical Engineers
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  • kcse
  • 한국과학기술단체총연합회
  • 한국학술지인용색인
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Title Study on Q Improvement of CMOS Spiral Inductor Using Multi Metal Layer for Silicon Substrate
Authors 손주호 ; 최석우 ; 김동용
Page pp.6-11
ISSN 1975-8359
Keywords Inductor ; Multi metal ; Quality factor, CMOS
Abstract The multi layer spiral inductors, which enhance the quality factor Q of an inductor fabricated on the silicon substrate, has been designed using a TSMC CMOS 0.2sum 1-poly 5-metal layer technology. To investigate the performance of the designed inductors, a 2.5-dimensional field simulation tool(Momentum) is used. The simulation results show that the quality factor Q of the 5-metal inductor is improved 1.8 times over that of a convention31 spiral inductor at 2GHz for wireless LAN applications.