| Title |
Study on the Luminescence of Si Nanocrystallites on Si Substrate fabricated by Changing the Wavelength of Pulsed Laser Deposition |
| Keywords |
Si-nanocrystallites ; pulsed laser deposition ; laser wavelength ; laser energy density ; quantum size effect |
| Abstract |
Silicon nanocrystalline thin films on p-type (100) silicon substrate have been fabricated by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355, 532, and 1064 nm. The base vacuum in the chamber was down to 10^-6 Torr and the laser energy densities were 1.0~3.0 J/ textrm cm^2 After deposition, silicon nanocrystalline thin films have been annealed at nitrogen gas. Strong Blue and green luminescence from silicon nanocrystalline thin films have been observed at room temperature by photoluminescence and its peak energies shift to green when the wavelength is increased from 355 to 1064 nm. |