| Title |
Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Micropump |
| Authors |
김진호 ; 문민철 ; 김주호 ; 김영호 ; 김한수 ; 한경희 ; 김용상 |
| Keywords |
micropump ; thermopneumatic- actuation ; PDMS ; ITOheater ; diffuser |
| Abstract |
A thermopneumatic-actuated polydimethylsiloxane (PDMS) micropump has been fabricated and their properties are characterized. The diffusers are used as a flow-rectifying element instead of passive check valves. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using PDMS and indium tin oxide (ITO) glass. We presented the PDMS micropump that is easily integrated with the in-channel PDMS microvalves on the same substrate. The flowrate of the micropump increases linearly as the applied pulse voltage to the ITO heater increases. The fabricated ITO heater resistance is 6.54kΩ. The peak of the flow rate is observed at the duty ratio of 10% for the applied pulse voltage of 55V at 6Hz and the maximum flow rate of 78nl/min is measured |