KIEE - The Transactions of the Korean Institute of Electrical Engineers

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The Transactions of the Korean Institute of Electrical Engineers

The Transactions of the Korean Institute of Electrical Engineers

ISO Journal TitleTrans. Korean. Inst. Elect. Eng.

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Title	Two-dimensional Analytic Solution of the Magnetic Field for the Ferrites of DC Magnetron Sputtering Device
Authors	유동훈(Yu Dong-Hun) ; 권득철(Kwon Deuk-Chul) ; 이종규(Lee Jong-Kyu) ; 윤남식(Yoon Nam-Sik) ; 김정형(Kim Jung-Hyung) ; 신용현(Shin Yong-Hyeon)
Page	pp.326-331
ISSN	1975-8359
Keywords	DC Magnetron Sputtering ; Analytic Solution ; Numerical Solution ; Magnetic Field ; Ferrite
Abstract	We obtain analytical expressions the magnetic field of ferrites for DC magnetron sputtering device, which has been widely used for vacuum thin film deposition, and suggested the equation on maximum radius of the magnetic field by analytic solution. Also, the analytic results are compared with some calculations using magnetization elements of right-angled hexahedron.

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