| Title |
A Fabrication Method of Blade Type Tip for Probe Unit Device |
| Authors |
이근우(Lee, Keun-Woo) ; 이재홍(Lee, Jae-Hong) ; 김창교(Kim, Chang-Kyo) |
| Keywords |
Blade Type Tip ; BeCu ; DFR ; FeCl_3 ; Electroplating |
| Abstract |
Beryllium copper has been known to be an important material for the various fields of industry because it can be used for mechanical and electrical/electronic components that are subjected to elevated temperatures (up to 400°C for short times). Blade type tip for probing the cells of liquid crystal display(LCD) was fabricated using beryllium copper foil. The dry film resist was employed as a mask for patterning of the blade type tip. The beryllium copper foil was etched using hydrochloric acidic iron-chloride solution. The concentration, temperature, and composition ratio of hydrochloric acidic iron-chloride solution affect the etching characteristics of beryllium copper foil. Nickel with the thickness of 3μm was electroplated on the patterned copper beryllium foil for enhancing its hardness, followed by electroplating gold for increasing its electrical conductivity. Finally, the dry film resist on the bridge was removed and half of the nickel was etched to complete the blade type tip. |