| Title |
A Study on the Microfabricated Clark-type Sensor for Measuring Dissolved Oxygen |
| Authors |
박정일(Park, Jung-Il) ; 장종현(Chang, Jong-Hyeon) ; 최명기(Choi, Myung-Ki) ; 이동영(Lee, Dong-Young) ; 김영미(Kim, Young-Mi) ; 박정호(Pak, Jung-Ho) |
| Keywords |
Clark-Type ; Oxygen Sensor ; Dissolved Oxygen ; Mmembrane |
| Abstract |
This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed, fabricated, and characterized a microfabircated Clark-type oxygen sensor for measuring dissolved oxygen. The microfabricated oxygen sensor consists of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing sample solution. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential for 2 hours against a commercial Ag/AgCl electrode and a stable cyclic voltammetry curve. Selectivity, response time, and linearity of the fabricated oxygen sensor were also verified well by cyclic voltammetry and amperometry depending. The fabricated oxygen sensor showed a 90% response time of 40sec and an excellent linearity with a correlation coefficient of 0.994. |