| Title |
Development of a MEMS Structure for an Infrared Focal Plane Array |
| Authors |
조성목(Cho, Seong-M.) ; 양우석(Yang, Woo-Seok) ; 류호준(Ryu, Ho-Jun) ; 전상훈(Cheon, Sang-Hoon) ; 유병곤(Yu, Byoung-Gon) ; 최창억(Choi, Chang-Auck) |
| Abstract |
A micromachined sensor part for an infrared focal plane array has been designed and fabricated. Amorphous silicon was adapted as a sensing material, and silicon nitride was used as a membrane material. To get a good efficiency of infrared absorption, the sensor was made as a {Λ}/4 cavity structure. All the processes were done in 0.5 μm iMEMS fab. in the Electronics and Telecommunication Research Institute (ETRI). The processed MEMS sensor structure had a small membrane deflection less than 0.3 μm. This excellent deflection property can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range 8 - 14 μm. |