| Title |
The Fabrication of On-chip Spiral Inductors Through 3-D Field Analysis |
| Authors |
이한영(Lee, Han-Young) ; 이우철(Lee, Woo-Cheol) |
| Keywords |
PGS ; Spiral Inductor ; On-chip ; Q-factor ; CMOS |
| Abstract |
In this paper, we verified basic forms and equivalent circuits of spiral inductors and various kinds of parasitics of equivalent circuits by using HFSS and Nexxim program that were 3-D EM analysis tools, and fabrication on-chip spiral inductors using Hynix's 0.25um 1-poly and 5-metal CMOS process. Comparing with PGS(patterned ground shield) and NPGS(non patterned ground shield) of spiral inductors of 3.5 turn, 4.5 turn and 5.5 turn, etc, the application of PGS could improve maximum Q value by 8-12%. |