| Title |
Nurmerical Study on the Discharge Characteristics of Cylindrical Microcavity Structure |
| Authors |
서정현(Seo, Jeong-Hyun) ; 강경두(Kang, Kyoung-Doo) |
| Keywords |
Microcavity ; Hollow cathode ; Microdischarge |
| Abstract |
In this paper, we have studied the basic discharge characteristics of ac-type cylindrical microcavity structure. The structure has a two electrodes, which are positioned in the bottom of the cavity and in the side wall of the cylinder, respectively. The discharge showed asymmetric phenomena depending on the position of a cathode electrode. When the bottom electrode was a cathode, the discharge was stronger even though the area of the cathode was smaller than that of the anode. Simulation results revealed that the focused electric field toward the bottom electrode increased ion density in the space which in turn strengthened the cathode sheath and ionization process. |