• 대한전기학회
Mobile QR Code QR CODE : The Transactions of the Korean Institute of Electrical Engineers
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Title A Study on the Scribing of FTO using Pulsed Nd:YAG Laser
Authors 김희제(Kim, Hee-Je) ; 박성준(Park, Sung-Joon) ; 손민규(Son, Min-Kyu) ; 이동길(Lee, Dong-Kil) ; 이경준(Lee, Kyoung-Jun)
Page pp.1407-1411
ISSN 1975-8359
Keywords Nd:YAG Laser ; Scribing ; FTO(Fluorine doped tin oxide) ; PIC ; DSSC(dye sensitized solar cell)
Abstract In material processing, a laser system with optimal laser parameters has been considered to be significant. Especially, the laser scribing technology is thought to be very important for fabricating DSSC(Dye sensitized solar eel!) modules with good quality. Moreover, the TEM_{00} mode laser beam is the most dominant factor to decide the IPCE(Incident photon to current conversion efficiency) characteristics. In order to get the TEM_{00} mode, a pin-hole is inserted within a simple pulsed Nd:YAG laser resonator. And the spatial field distribution is measured by using three size pin-hole diameters of 2.0, 6.0mm respectively. At that moment, each case has the same laser beam energy by adjusting the discharge voltage and pps(pulse per second). From those results, it is known that the pin-hole size of 2.0mm has the perfect TEM_{00} mode. In addition, at the charging voltage of 1000V, 10pps and the feeding speed of 1.11mm/sec, the SEM photo of FTO(Fluorine-doped tin oxide) thin film layers shows the best scribing trace.