Mobile QR Code QR CODE : The Transactions of the Korean Institute of Electrical Engineers
Title Impact of Displacement Defect on Laterally Diffused MOS (LDMOS) using Numerical Simulation
Authors 김정식(Jungsik Kim)
Page pp.1470-1473
ISSN 1975-8359
Keywords Radiation effect; LDMOS; numerical simulation; TCAD simulation.
Abstract The effect of displacement defect due to radiation effect is investigated in laterally diffused metal oxide semiconductor (LDMOS) using technology computer-aided design (TCAD) simulation. The displacement defect with acceptor-like trap of deep level (Ec-0.4eV) under shallow trench isolation (STI) induces the worst degradation of Id-Vg characteristic. The location of defect under STI with lightly doping concentration is the worst position to transfer characteristic of Id-Vg. For breakdown voltage characteristic, the positions and types of displacement trap are negligible, because of high drain voltage operation.