| Title |
Properties of TiZrN thin Film Formed by Arc Ion Plating Method using Ti-Zr Alloy Target |
| DOI |
https://doi.org/10.5370/KIEE.2022.71.7.987 |
| Keywords |
Ti-Zr Alloy; TiZrN; Arc Ion Plating; Vacuum Arc Remelting; Adhesion Force |
| Abstract |
80Ti-20Zr, 50Ti-50Zr, 20Ti-80Zr [wt%] alloy composition was designed to develop a Ti-Zr alloy target that can exhibit various properties depending on the composition ratio. And the vacuum arc melting process was established and finally, a 100[mmφ] Ti-Zr alloy ingot was developed. Then, using the Ti-Zr alloy target of these three compositions, the AIP process was performed while changing the bias voltage to form a TiZrN thin film with a thickness of about 3[μm]. The TiZrN thin film was able to achieve an adhesion force of 60[N] or more and a high hardness of 1,500[Hv] under the 100[V] bias condition, and various characteristic changes were considered by changing the Ti and Zr composition of the alloy target. |