M. A. Lieberman, Allan J. Lichtenberg, “Principles of Plasma Discharges and Materials Processing,” A JOHN WILEY&SON, INC PUBLICATION, 2005.

J. H. Cha, K. S. Seo, S. W. Kim, H. J. Lee, “Two-dimensional fluid simulation of inductively coupeld N2/NH3/SiH4 discharge,” J. Phys. D: Appl. Phys, vol. 55, no. 3, pp. 035203-035220, 2021. DOI:10.1088/1361-6463/ac2b62

Z. Chen, M. Liu, P. Zhou, W. Chen, X. Hu “A Novel Structure of Slot Antenna Array for Producing Large-Area Planar Surface-Wave Plasmas,” Plasma. Sci. Tech, vol. 10, no. 6, pp. 655-660, 2008. DOI:10.1088/1009-0630/10/6/01

H. Sugai, I. Ghanashev, M. Nagatsu, “High-density flat plasma production based on surface waves,” Plasma. Sources. Sci. Technol, vol. 7, pp. 192-205, 1998. DOI:10.1088/0963-0252/7/2/014

J. H. CHA, S. W. Kim and H. J. Lee, “A linear Microwave Plasma Source Using a circular Waveguide Filled with a Relatively High-permittivity Dielectric: Comparison with a Conventional Quasi-Coaxial Line Waveguide,” Appl.Sci. vol. 11, no. 12, pp. 5358-5377, 2021. DOI:10.3390/app11125358

User Manual, “COMSOL Multiphysics,” COMSOL LAB, 2017.

A. R. Niknam, M. Menati, M. Hashemzadeh, M. M. Zahedi “Fundamentals of Slot Antenna Designing for Application in Surface Wave Plasma Sources,” IEEE Trans. Plasma. Sci, vol. 40, no. 2, pp. 470-480, 2012. DOI:10.1109/TPS.2011.2177529.

David M. Pozar, “Microwave Engineering” A JOHN WILEY&SON, INC PUBLICATION, 2011.